BSET EQ manufactures Gas Plasma Systems Used for Plasma Etching, Cleaning, Surface Modification and Coating. These dry processes are environmentally friendly and our systems are used worldwide in an increasing number of industries.

FA 2000 Series Reactive Ion Etchers Anisotropic or isotropic etch Industry leader in isotropic d-cap Passivation removal Removal of interlayer dielectrics Single wafer clean, strip or etch Reverse sputtering Specialty decap of I.C.s General R&D

SP Series Classic Barrels Reactors Isotropic batch etching Asbestos analysis Ashing, etching or cleaning apps Resist strip or descum of wafers Wafer etching in batch Hybrid circuit cleaning Treatment of odd shaped items SEM sample prep

NT Series Planar Batch Plasma Systems Anisotropic or Isotropic action Semiconductor packaging apps Die attach, wirebond, ball attach, molding and marking PCB manufacture applications Wafer probe manufacturing 300mm wafer etching for reclaim

Parts Sourcing and Other Services Plasma system repair Plasma system rental RF supply repair and calibration MFC repair and calibration Vacuum gauge calibration Parts sourcing Installation and training Maintenance contracts available

Lab Services Plasma process consultation Toll services, plasma treatment Free sample Treatments Support for antiquated equipment Consultation on outside equipment

High tech, flexibility and affordability have always been important assets at BSET EQ. We service all industries including: Aerospace, Electronics, Medical and Semi-Conductor. Whether you are doing Research and Development or short to full scale production runs it is likely that we have a system designed for your application.